Micro-indentation relaxation measurements in polymer thin films

Authors: Shinozaki, D.; Lu, Y.

Source: Journal of Electronic Materials, Volume 26, Number 7, July 1997 , pp. 852-858(7)

Publisher: Springer

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Abstract:

A micro-indenter consisting of a piezo-electric driven flat cylindrical punch has been used to measure the dynamic mechanical properties of polystyrene films as thin as 50 μm. The measured viscoelastic response was sensitive to the bonding of the polystyrene to an underlying silicon substrate for films which were thinner than one indenter diameter. The instrument therefore was shown to have practical use in measuring the dynamic mechanical response of polymer films, and the strength of bonding between disparate materials.

Keywords: Dynamic mechanical test; Microindentation; Polymer films; Polystyrene; Viscoelastic

Document Type: Research article

DOI: http://dx.doi.org/10.1007/s11664-997-0262-x

Publication date: 1997-07-01