High-Speed Coplanar Waveguide Based Submount for 40 Gbit/s Electroabsorption Modulator

Authors: Xiong, Bing; Tian, Jianbo; Wang, Jian; Cai, Pengfei; Sun, Changzheng; Luo, Yi

Source: International Journal of Infrared and Millimeter Waves, Volume 26, Number 10, October 2005 , pp. 1491-1500(10)

Publisher: Springer

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Abstract:

A high-speed submount has been designed and fabricated for 40 Gb/s electroabsorption (EA) modulators. The submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta₂N thin-film resistor for impedance matching. The CPW transmission line is designed to ensure low microwave loss and reflection, and Ti/Cu/Ni/Au metal is adopted for electrode fabrication to guarantee good contact with the Ta₂N thin-film. The typical reflection coefficient of fabricated submount is estimated to be lower than-21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was chip-level packaged using the high-speed submount, and the measured small-signal modulation bandwidth was over 40 GHz.

Keywords: High-speed submount; Low-Loss Coplanar Waveguide (CPW); Thin-Film Resistor; 40 Gb/s Electroabsorption (EA) Modulator

Document Type: Research article

DOI: http://dx.doi.org/10.1007/s10762-005-8446-z

Affiliations: 1: State Key Lab of Integrated Optoelectronics Department of Electronic Engineering, Tsinghua University, Beijing, 100084, P.R. China,

Publication date: 2005-10-01