Linear High-Tc YBa₂Cu₃O_7- Superconducting Thin Film Infrared Detectors Coupled with a Cylindrical Microlens Array in Quartz Glass Substrate

Authors: Zhang X.; Yi X.; He M.; Zhao X.

Source: International Journal of Infrared and Millimeter Waves, Volume 20, Number 6, June 1999 , pp. 1047-1058(12)

Publisher: Springer

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Abstract:

Monolithic linear cylindrical microlens array in a quartz glass substrate is fabricated using photolithography and ion beam etching technique, the high-Tc YBa₂Cu₃O_7- superconducting thin films are deposited through excimer laser scanning ablation, the superconducting thin films are patterned by photolithographic method and ion beam etching technique, and the hybrid structure of the microlens array component and the superconducting IR detectors has been obtained using an IR glue to cement the microlens component onto the superconducting device. We also investigate the optical response characteristics of the hybrid device in the optical spectral region of 1 ~ 5 m, as follows. The average optical responsivity (\overline {R}) of the hybrid device is 1.6×10⁴ V/W, average noise equivalent power (\overline {NEP}) is 2.3×10^-12 WHz^-1/2, average detectvity (\overline{D^*}) is 3.2×10⁹ cmHz^1/2W^-1, and the non-uniformity of detectvity (D*) is not more than 14%. The experimental results show that the performance of the superconducting device is improved notably using a quartz glass refractive microlens array as the incident IR radiation concentrators.

Keywords: Cylindrical microlens array; superconducting detectors; infrared radiation; the hybrid structure of superconductors and microl

Language: English

Document Type: Research article

Affiliations: 1: Department of Opto-Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China

Publication date: 1999-06-01