Langmuir Probe Measurement of the Electron Temperature in the Plasma Plume Formed by Pulsed Laser Deposition of Bi-Sr-Ca-Cu-O

Authors: Wild J.¹; Kudrna P.²; Gronych T.²; Jirsák T.²; Kubát P.³; Zelinger Z.³; Civi scaron S.³

Source: Czechoslovak Journal of Physics, Volume 53, Number 2, February 2003 , pp. 171-177(7)

Publisher: Springer

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Abstract:

The electron temperature of the plasma formed during pulsed laser deposition of Bi-Sr-Ca-Cu-O target was measured using Langmuir probe. The main parameters of the experiment were as follows: The distance of the probe from the target was in the range of (4-6) mm, the basic working pressure was 2×10^-3 Pa and the planar pulse energy density of laser beam was approximately 8 J/cm². The obtained values of electron temperature were in the range of (1.0-2.5) eV. Presented results are discussed from the point of view of different theories of plasma splitting.

Keywords: pulsed laser deposition; Langmuir probe; Bi-Sr-Ca-Cu-O

Language: English

Document Type: Research article

Affiliations: 1: Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Hole scaron ovi ccaron kách 2, 180 00 Praha 8, Czech Republic jan.wild@mff.cuni.cz ovi ccaron kách 2, 180 00 Praha 8, Czech Republic jan.wild@mff.cuni.cz "> 2: Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Hole scaron ovi ccaron kách 2, 180 00 Praha 8, Czech Republic ovi ccaron kách 2, 180 00 Praha 8, Czech Republic "> 3: J. Heyrovský Institute of Physical Chemistry, Acad. Sci. CR, Dolej scaron kova 3, 182 23 Praha 8, Czech Republickova 3, 182 23 Praha 8, Czech Republic">