Modelling and analysis of multiple cluster tools system with random failures using coloured Petri net

Author: Aized, Tauseef

Source: The International Journal of Advanced Manufacturing Technology, Volume 50, Numbers 9-12, October 2010 , pp. 897-906(10)

Publisher: Springer

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Abstract:

Semiconductor manufacturing is among the most complicated and expensive operation systems encountered today and multiple cluster tool system has become an important technology in semiconductor manufacturing systems with the advantages of higher yields and shorter cycle times. Modelling and simulation has become a standard methodology in order to understand and predict performance of semiconductor manufacturing systems. Resources random failures during process execution are one major concern regarding system performance measured in terms of throughput and cycle time. This study aims to models and analyse random failures of processing modules of multiple cluster tool systems using coloured Petri net method. The impact of different input factors on system throughput and cycle time is presented.

Keywords: Multiple cluster tool system; Modelling; Random failure; Coloured Petri net

Document Type: Research article

DOI: http://dx.doi.org/10.1007/s00170-010-2592-8

Affiliations: 1: Department of Mechanical, Mechatronics and Manufacturing Engineering, University of Engineering and Technology, KSK Campus, Lahore, Pakistan, Email: tauseef.aized@uet.edu.pk

Publication date: 2010-10-01