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Study on Photosensitive Imaging System and Its Performance

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In this paper, several affinity switching copolymers had been synthesized by the copolymerization of butyl acrylate (BMA), methyl methacrylic acid (MAA) and styrene as monomers. The photosensitive imaging system was composed with the copolymers, bisvinyl ether (BPA-DEVE) and photoacid generators (PAGs). The imaging performances and dissolution property of the tercomponent system were systematically investigated, and results showed that the imaging performances and dissolution property of the tercomponent systems were strongly dependent on the specific composition of the copolymer, the photoacid generator, the baking temperature and the baking time. Meanwhile, the crosslinking degree could be deepened by increasing the amount of BVE and the pre-baking temperature as well as prolonging the pre-baking time. Ideal results would be obtained when the three factors were adjusted properly. In addition, the higher proportion of MMA unit in the copolymers, the better performance of the tercomponent system.

Document Type: Research Article

Publication date: January 1, 2009

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