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Ink Jet Printing of PZT Thin Films For MEMS Applications

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Thermal ink jet (TIJ) deposition of lead zirconate titanate (PZT) thin films via a modified sol-gel was recently reported by our group [1-2]. Despite the strong piezoelectric performance, the use of PZT in microelectromechanical systems (MEMS) has thus far been limited due to the lack of process compatibility with existing MEMS manufacturing processes. Digital fabrication of PZT thin films eliminates the need for photolithographic patterning and etching, a major source of process incompatibility. Furthermore, direct printing of PZT films enables new device designs by allowing controlled deposition over non-planar topographies, and the fabrication of devices with varying thickness, neither of which can be accomplished with a conventional spin coating process. This paper reports conditions of deposition and crystallization for PZT thin films via thermal ink jet printing. Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a highly piezoelectric crystal structure.
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Document Type: Research Article

Publication date: 01 January 2008

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  • For more than 30 years, IS&T's series of digital printing conferences have been the leading forum for discussion of advances and new directions in 2D and 3D printing technologies. A comprehensive, industry-wide conference that brings together industry and academia, this meeting includes all aspects of the hardware, materials, software, images, and applications associated with digital printing systems?particularly those involved with additive manufacturing and fabrication?including bio-printing, printed electronics, page-wide, drop-on-demand, desktop and continuous ink jet, toner-based systems, and production digital printing, as well as the engineering capability, optimization, and science involved in these fields. In 2016, the conference changed its name formally to Printing for Fabrication to better reflect the content of the meeting and the evolving technology of printing.

    Please note: For purposes of its Digital Library content, IS&T defines Open Access as papers that will be downloadable in their entirety for free in perpetuity. Copyright restrictions on papers vary; see individual paper for details.

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