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Precision Deposition of Functional Layers for Microcantilever Sensor Generation

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Abstract:

A new platform of highly sensitive chemical and biological sensors using microcantilever arrays as transducers has emerged. In the critical step of functionalization, a chemically selective layer is deposited onto the cantilever surface making the sensor specific to binding or adsorption of a target analyte. Very precise deposition in volume and spatial accuracy has been achieved through the development of an inkjet functionalization system. In this paper, the methods for achieving maximum resolution are discussed. A high precision motion control system is presented which includes an X-Y stage powered by linear electric motors to achieve sub-micron positioning. A novel laser-optical registration method is developed to achieve the desired accuracy between the nozzle tip and the substrate. The inkjet functionalization system has enabled research to understand the effects of polymeric coatings on cantilever stiffness and quality factor. The system has been used to functionalize microcantilevers with magnetic micro beads using biotin-streptavidin binding.

Document Type: Research Article

Publication date: 2007-01-01

More about this publication?
  • For more than 25 years, NIP has been the leading forum for discussion of advances and new directions in non-impact and digital printing technologies. A comprehensive, industry-wide conference, this meeting includes all aspects of the hardware, materials, software, images, and applications associated with digital printing systems, including drop-on-demand ink jet, wide format ink jet, desktop and continuous ink jet, toner-based electrophotographic printers, production digital printing systems, and thermal printing systems, as well as the engineering capability, optimization, and science involved in these fields.

    Since 2005, NIP has been held in conjunction with the Digital Fabrication Conference.

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