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MEMS-Based Inkjet Drop Generators from Plastic Substrates

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We report fabrication of a functional inkjet drop generator from plastic substrates exclusively using MEMS-based processing steps. Polyimide and poly(ethylene naphthalate) sheets laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600 npi array as small as 2.4 pL in volume (16.5 μm in diameter) at drop velocities of 15.5 m/s is realized with these devices.

Document Type: Research Article

Publication date: January 1, 2007

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  • For more than 25 years, NIP has been the leading forum for discussion of advances and new directions in non-impact and digital printing technologies. A comprehensive, industry-wide conference, this meeting includes all aspects of the hardware, materials, software, images, and applications associated with digital printing systems, including drop-on-demand ink jet, wide format ink jet, desktop and continuous ink jet, toner-based electrophotographic printers, production digital printing systems, and thermal printing systems, as well as the engineering capability, optimization, and science involved in these fields.

    Since 2005, NIP has been held in conjunction with the Digital Fabrication Conference.

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