Skip to main content

Effects of Thin Film Layers on Actuating Performance of Micro Heaters

Buy Article:

$12.00 plus tax (Refund Policy)

Effects of thin film layers have been investigated on the actuating performance of micro heaters. Bubble behaviors on micro heaters were observed experimentally, and heat conduction characteristics in thin film layers were analyzed numerically. Nine (9) kinds of tantalum nitride (TaN) micro heaters were prepared. Step-stress test (SST) showed that maximum endurable voltage levels in the non-passivated heaters are less than 50% of those in the passivated heaters. Open pool bubble test was carried out using de-ionized (DI) water as a working fluid. The non-passivated heaters could produce comparable bubbles with only 20 to 50% of the input energy required for the passivated heaters. However, the non-passivated heaters could operate only in a narrow range of driving voltage. A hybrid model for bubble nucleation was newly proposed to correlate the nucleation times obtained experimentally. The hybrid model adopts different nucleation criterion depending on the input power level. Based on the bubble work obtained from the bubble volume estimated experimentally, actuating efficiencies of micro heaters were calculated and compared. Efficiencies of the non-passivated heaters were much higher than those of the passivated heaters. However, robust actuating characteristics were difficult to obtain in a wide range of power density. Applicability of non-passivated heaters as promising micro actuators needs further investigation from the viewpoints of robustness and reliability.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics

Document Type: Research Article

Publication date: 2006-01-01

More about this publication?
  • For more than 30 years, IS&T's series of digital printing conferences have been the leading forum for discussion of advances and new directions in 2D and 3D printing technologies. A comprehensive, industry-wide conference that brings together industry and academia, this meeting includes all aspects of the hardware, materials, software, images, and applications associated with digital printing systems?particularly those involved with additive manufacturing and fabrication?including bio-printing, printed electronics, page-wide, drop-on-demand, desktop and continuous ink jet, toner-based systems, and production digital printing, as well as the engineering capability, optimization, and science involved in these fields. In 2016, the conference changed its name formally to Printing for Fabrication to better reflect the content of the meeting and the evolving technology of printing.

    Please note: For purposes of its Digital Library content, IS&T defines Open Access as papers that will be downloadable in their entirety for free in perpetuity. Copyright restrictions on papers vary; see individual paper for details.

  • Information for Authors
  • Submit a Paper
  • Subscribe to this Title
  • Membership Information
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more