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FIB and DualBeam Technology: Nanoprototyping and Nanofabrication Applications

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Abstract:

The use of focused ion beam (FIB) technology in the area of nanoprototyping and nanofabrication is becoming increasingly important as dimensions of emphasis continue to shrink from the micrometer to the nanometer level. FIB technology is being utilized in novel ways to engineer nano-structures and devices employing ion- and/or electron-beam deposition of metals, organic materials or insulators, and milling of materials with the ion beam. Using an on-board digital pattern generator and scripting language to control the instrument, nanoscale fabrication of complex structures can be reproducibly created with the FIB with little or no user intervention. Beam parameters such as dwell time, beam overlap and beam spot size may be controlled via digital patterning or scripting. The figure below reveals that channel widths of less than 100 nm are easily achievable with FIB milling. This interactive presentation will summarize the nanofabrication techniques and show how arrays of nano-structures can be generated with a high degree of repeatability.

Document Type: Research Article

Publication date: 2005-01-01

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  • For more than 30 years, IS&T's series of digital printing conferences have been the leading forum for discussion of advances and new directions in 2D and 3D printing technologies. A comprehensive, industry-wide conference that brings together industry and academia, this meeting includes all aspects of the hardware, materials, software, images, and applications associated with digital printing systems?particularly those involved with additive manufacturing and fabrication?including bio-printing, printed electronics, page-wide, drop-on-demand, desktop and continuous ink jet, toner-based systems, and production digital printing, as well as the engineering capability, optimization, and science involved in these fields. In 2016, the conference changed its name formally to Printing for Fabrication to better reflect the content of the meeting and the evolving technology of printing.

    Please note: For purposes of its Digital Library content, IS&T defines Open Access as papers that will be downloadable in their entirety for free in perpetuity. Copyright restrictions on papers vary; see individual paper for details.

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