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A Study of Digital Fabrication using High-resolution Liquid Toner Electrophotography

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We have studied a new digital fabrication technology using highresolution liquid toner electrophotography, which consists of fine liquid toner, high-resolution exposure unit and non-electrical transfer. Fine pitch multi-line patterns of Cu wiring can be obtained by printing fine lines with seed toners, and by electroless plating deposited on lines. Seed toners are submicrons in diameter with superfine conductive particles on the surface. The multi-line patterns of 1 pixel line-width (21.6 micrometers) with the volume resistivity of 2.1 × 10−6 Ω·cm were realized by using a liquid toner developing process with a 1200 dpi resolution LED.

Furthermore, the capability of high-resolution multi-line pattern formation has been investigated by theoretical analysis. Liquid toner developing process with a 2540 dpi resolution LSU was examined by numerical simulations, taking account of the potential distributions of multi-line patterns. The capability of multi-line pattern formation of Line and Space (L/S) = 10/10 micrometers was indicated and the experimental result confirmed it.

Document Type: Research Article

Publication date: 2005-01-01

More about this publication?
  • For more than 25 years, NIP has been the leading forum for discussion of advances and new directions in non-impact and digital printing technologies. A comprehensive, industry-wide conference, this meeting includes all aspects of the hardware, materials, software, images, and applications associated with digital printing systems, including drop-on-demand ink jet, wide format ink jet, desktop and continuous ink jet, toner-based electrophotographic printers, production digital printing systems, and thermal printing systems, as well as the engineering capability, optimization, and science involved in these fields.

    Since 2005, NIP has been held in conjunction with the Digital Fabrication Conference.

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