A Numerical Study of High Resolution Latent Image Generation by Laser Beam Exposure

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Abstract:

In order to study the latent image generation process including the characteristics of laser beam and photoreceptor, a numerical method which solves the three dimensional time dependent coupled system of the transport equations for charges and the Poisson equation for electrostatic field is proposed. Combining the simulation with electrostatic field computation in development region, the strength and the extent of spreading of the electrostatic field due to the latent image is analyzed. The image of isolated 1 dot exposure shows larger spreading, while that of 1 by 1 dot shows weaker electrostatic-field strength. The dependence of the spreading on the beam radius indicates that the repulsion of charge due to space-charge effect becomes significant as the beam diameter decreases. The numerical results are compared with the experimental ones of a test-bed for the high-resolution development, and show the excellent correlation with the experimental developed images.

Document Type: Research Article

Publication date: January 1, 2000

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