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Development of a New Generation Surface Layer for an a-Si Photoreceptor Drum

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We looked into the relationship between the unclear image problem and the surface free energy of an a-Si photoreceptor drum and found that the unclear image problem does not happen when low surface free energy is maintained.

We succeeded in getting a low surface free energy by fluorination (a-C:H:F) using CF4 etching and achieved anti-oxidation improvement by optimizing a-C:H film deposition. Repeated steps of a-C:H film deposition and CF4 etching were applied to fluorinate deeper into the layer.

As a result, an ideal drum was produced which did not cause any unclear images in tests.

Document Type: Research Article

Publication date: January 1, 1999

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