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Resonator structure with high etching error tolerance for application in HTS filters

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Dimensional errors introduced during the etching process in the fabrication of a planar microwave circuit can significantly affect the performance of the circuit. Full-wave electromagnetic simulations are used to study the influence of etching errors on the performance of high temperature superconductor (HTS) resonators. Resonators with self-coupling are found to have a high tolerance for etching error. This kind of resonator can be useful for applications in planar HTS resonators and filters.

Document Type: Miscellaneous

Publication date: January 1, 2002

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