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Preparation of smooth and films by two-beam excimer laser deposition

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A laser deposition arrangement for the preparation of smooth and films is presented. An excimer laser beam is split by a knife-edge prism into two beams, which are focused onto two rotating targets oriented perpendicular to each other. The two laser-induced molecular streams collide and form a new stream containing mainly light molecules and almost no droplets. The molecules from this stream deposit on a substrate that is placed in the shadow of the original molecular streams. The use of copper-poor targets prevented the occurrence of precipitates.

Document Type: Miscellaneous

Affiliations: 1: Institut für Angewandte und Experimentelle Physik, Universität Regensburg, Universitätsstrasse 31, 93040 Regensburg, Germany 2: Lebedev Physics Institute, RAS, Leninskii Prospeckt 53, 117924 Moscow, Russia 3: Fachbereich Physik, Universität Wuppertal, Gauss-Strasse 20, 42097 Wuppertal, Germany

Publication date: March 1, 1998

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