IngentaConnect Comparison of frequency responses of spiral inductors with differ...

Authors: Lee J-M.¹; Lee T-W.²; Park S.H.²; Min B-G.²; Park M.P.²; Lee K-H.²; Choi I-H.¹

Source: Semiconductor Science and Technology, Volume 16, Number 2, 2001 , pp. 66-71(6)

Publisher: Institute of Physics Publishing

Abstract:

The results of a comprehensive investigation into the characteristics of inductors fabricated by the GaAs monolithic microwave integrated circuit (MMIC) process are presented. Various spiral inductors with different figures were fabricated and measured, and their frequency responses were investigated. The S-parameter optimization was used to estimate the lumped elements of the pi-equivalent circuit model of inductors. The simulated results indicate that the quality factor [iopmath latex="$(Q)$"] (Q) [/iopmath] of the inductor is dominated by loss in the metal strip at lower frequency, and loss introduced by the substrate dissipation tends to dominate the performance at higher frequency. In addition, the inductance affects the Q value over the whole frequency range. The series resistance of a circular inductor is about 10% smaller than that of a square inductor with the same diameter. The reduction of the diameter and turns decrease the Q value at lower frequency, but the Q value is increased at higher frequency since the rapid drop of inductance induces the decrease of [iopmath latex="$Q_{\rm met}$"] Q_met [/iopmath] and the increase of [iopmath latex="$Q_{\rm sub}$"] Q_sub [/iopmath] . The wide metal width increases [iopmath latex="$Q_{\rm met}$"] Q_met [/iopmath] by the reduction of the resistance and the increase of inductance. To guide the design of inductor, the design formula was established based on experimental results. It is expected that when the geometrical dimension is selected the formula will help us to predict the properties of inductors easily. Among the three types of inductor, the circular and octagonal inductors have the higher quality factor and the lower loss, which implies that these types of inductor are appropriate for GaAs MMIC applications.

Language: English

Document Type: Miscellaneous

Affiliations: 1: Department of Materials Science and Engineering, Korea University, 5-1 Anam-dong, Sungbuk-gu, Seoul 136-701, Korea 2: ETRI-Microelectronics Technology Laboratory, 161 Kajong-dong, Yusong-gu, Taejon 305-350, Korea

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Comparison of frequency responses of spiral inductors with different figures