If you are experiencing problems downloading PDF or HTML fulltext, our helpdesk recommend clearing your browser cache and trying again. If you need help in clearing your cache, please click here . Still need help? Email help@ingentaconnect.com

Micromachined infrared detectors based on pyroelectric thin films

$108.74 plus tax (Refund Policy)

Buy Article:

Abstract:

The state of the art of thin-film pyroelectric infraredĀ (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacities and the substrate influence on the pyroelectric properties. For the latter, an overview of the hitherto reported values is given. Examples of micromachined IR detectors based on pyroelectric thin films are described. The ultimate limit of micromachined thermal IR detectors is estimated for uncooled operation. It is concluded that the best pyroelectric thin films achieved to date are in principle sufficiently good to approach this limit, meaning that the present performance of pyroelectric thin-film focal plane arrays can still be improved by more than a factor of 10. A comparison of the different principles for IR detection shows that pyroelectricity is indeed one of the most competitive principles for uncooled IR detection. The major obstacle hindering quick industrialization is the fabrication complexity.

Document Type: Miscellaneous

Publication date: January 1, 2001

Related content

Tools

Favourites

Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more