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Electronegative plasmas - why are they so different?

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Abstract:

This paper seeks to summarize the work that has gone on over the past 20 years in plasmas that has become of great commercial importance but was not studied in depth previously. It points up the differences between conventional electropositive plasmas and those where negative ions dominate. It removes some of the errors and misunderstandings that have occurred and tries to bring the field into a coherent consistent whole.

Document Type: Miscellaneous

Publication date: January 1, 2002

iop/psst/2002/00000011/0000003a/art00304
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