Plasma deposition of boron-containing hard carbon films a-C/B:H from organic boron compounds

Authors: Winter J.; Grobusch L.; Rose T.; Seggern J.v.; Esser H.G.; Wienhold P.

Source: Plasma Sources Science and Technology, Volume 1, Number 2, 1992 , pp. 82-86(5)

Publisher: Institute of Physics Publishing

Key:
Free Content - Free Content
New Content - New Content
Subscribed Content - Subscribed Content
Free Trial Content - Free Trial Content

Language: English

Document Type: Miscellaneous

The full text electronic article is available for purchase. You will be able to download the full text electronic article after payment.

$38.47 plus tax

 

OR

Back to top

Key:
Free Content - Free Content
New Content - New Content
Subscribed Content - Subscribed Content
Free Trial Content - Free Trial Content
Page Help Click here for Page Help
Shopping cart
Tools
Sign in






Need to register?
Sign up here
Text size: A | A | A | A