Deep ultraviolet scatterometer for dimensional characterization of nanostructures: system improvements and test measurements

Authors: Wurm, Matthias; Bonifer, Stefanie; Bodermann, Bernd; Richter, Jan

Source: Measurement Science and Technology, Volume 22, Number 9, September 2011 , pp. 94024-94032(9)

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Abstract:

A novel type of deep ultraviolet scatterometer recently developed and set up at PTB has been significantly improved with respect to the dynamic range and the signal-to-noise ratio of the measured scatterograms. The main modifications concern a novel digital data acquisition technique and a new method for the calibration of the applied detectors. With the improved system linewidths (critical dimensions), measurements on periodic structures on a state-of-the-art MoSi photomask have been carried out. The results are compared to those achieved with a scanning electron microscope and a spectroscopic scatterometer.

Document Type: Research article

DOI: http://dx.doi.org/10.1088/0957-0233/22/9/094024

Publication date: 2011-09-01