Magnetic materials for MEMS applications

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In this Subject: Physics (General)
By this author: M.R.J. Gibbs ;&nbsp; E.W. Hill ;&nbsp; P.J. Wright

Authors: M.R.J. Gibbs; E.W. Hill; P.J. Wright

Source: Journal of Physics D: Applied Physics, Volume 37, Number 22, 21 November 2004 , pp. R237-R244(8)

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Abstract:

This topical review discusses magnetic microelectromechanical systems (MagMEMS). A number of exemplars are drawn from the authors' own work, and a review is given of other significant literature in the area. The case is made that MagMEMS offer unique features over conventional MEMS, such as remote interrogation and self-test. A review of the key magnetic principles and magnetic materials is included by way of a guide to the general reader. Finally, a roadmap for the future development of MagMEMS is set out.

Document Type: Research article

DOI: http://dx.doi.org/10.1088/0022-3727/37/22/R01

Publication date: 2004-11-21