Modelling of an accelerometer based on a levitated proof mass

In this: publication
By this: publisher
In this Subject: Nuclear Physics
By this author: Houlihan R. ;&nbsp; Kraft M.

Authors: Houlihan R.; Kraft M.

Source: Journal of Micromechanics and Microengineering, Volume 12, Number 4, 2002 , pp. 495-503(9)

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Abstract:

A system level model of a force balance accelerometer in which the proof mass is levitated with electrostatic forces is presented. The position of the proof mass is detected capacitively and controlled electrostatically. The mathematical modelling of the system is described. In particular, equations for the capacitances and electrostatic forces are derived and verified by comparison with a finite element model. They are then implemented in a Simulink system level model of the accelerometer.

Language: English

Document Type: Miscellaneous

Publication date: 2002-01-01