On the out-of-plane deformation of V-shaped micromachined beams

In this: publication
By this: publisher
In this Subject: Nuclear Physics
By this author: Tsou C. ;&nbsp; Yin H. ;&nbsp; Fang W.

Authors: Tsou C.; Yin H.; Fang W.

Source: Journal of Micromechanics and Microengineering, Volume 11, Number 2, 2001 , pp. 153-160(8)

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Abstract:

V-shaped beams are widely applied for the suspension of the sensors, fiber holders, and the suspension arms of atomic force microscopes. The performance of the V-shaped beam is highly dependent upon its initial out-of-plane deflection. This paper reports on the exploration of the out-of-plane deformation of V-shaped micromachined beams. A finite element model has been established to predict the deformation of a V-shaped micromachined beam. The fabrication and characterization of various shapes of SiO₂ V-shaped micromachined beams has been performed to observe the out-of-plane deformation caused by residual stress. With the difference between the analytical and experimental results, an etching process dependent mechanism has been discussed. Thus the design criteria to fabricate a flat V-shaped beam is accomplished.

Language: English

Document Type: Miscellaneous

Publication date: 2001-01-01