Characteristic modes of electrostatic comb-drive X-Ymicroactuators
Authors: Harness T.; Syms R.R.A.
Source: Journal of Micromechanics and Microengineering, Volume 10, Number 1, 2000 , pp. 7-14(8)
Publisher: IOP Publishing
The design of dual axis microengineered comb-drive electrostatic actuators is investigated. Experimental measurements of diode-isolated bulk micromachined x-ystages with a folded, single-flexure suspension show the presence of unwanted two-dimensional vibrational mode patterns. A combination of coupled-mode and finite-element analysis is used to explain the existence of the spurious modes, and good agreement is obtained with the experimental response provided that the intrinsic stress is taken into account. It is shown that improved performance can be obtained simply by doubling the number of suspension flexures.
Document Type: Miscellaneous
Publication date: 2000-01-01