Preparation and test on mechanical characteristics of W/Al bilayer films
Source: International Journal of Materials and Structural Integrity, Volume 3, Number 4, 22 November 2009 , pp. 261-268(8)
Publisher: Inderscience Publishers
Abstract:A W/Al double‐layer metal film sample has been prepared by the magnetron sputtering method on glass substrates. The membrane‐substrate system sample was measured by using nano‐indentation test for investigating the mechanical characteristics. Based on the analysis of the data from the indentation experiments, the elastic modulus, hardness of the system and other mechanical properties as well as the mechanical parameters were investigated. The results lay an experimental basis for future work.
Document Type: Research Article
Affiliations: 1: Laboratory of Advanced Design, Manufacturing & Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, P.R. China. 2: Laboratory of Advanced Design, Manufacturing & Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, P.R. China
Publication date: November 22, 2009
- International Journal of Materials and Structural Integrity is a fully-refereed journal that aims to provide a unique medium of communication for multidisciplinary approaches, either empirical or theoretical, to the study of materials and structural integrity. Its goals are to promote cross-fertilization of ideas between all the scientific disciplines having to deal with their own materials and structural integrity, including engineering, bionics, physics and chemistry.
International Journal of Materials and Structural Integrity is committed to the highest scientific standards, judging contributions on their contents and scientific value alone, rather than whether methods, questions, style, or language conform to the customs of a particular field.
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