Authors: Ortloff, Dirk¹; Popp, Jens²; Schmidt, Thilo³; Bruck, Rainer⁴

Source: International Journal of Computational Materials Science and Surface Engineerin, Volume 2, Numbers 3-4, 28 July 2009 , pp. 312-334(23)

Publisher: Inderscience Publishers

Abstract:

This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of MEMS based on semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted. Solutions to several of these problems are provided by a software tool suite called XperiDesk. This suite results from a three year project funded by the European Commission under the 6th framework programme. The project called PROMENADE European Commission resulted in prototype software tools which are currently in a maturity phase and will be released as XperiDesk product suite.

Keywords: COMPUTING AND MATHEMATICS JOURNALS; Computing Science, Applications and Software; TECHNICAL JOURNALS; Electronic Systems, Control and Artificial Intelli; Materials and Manufacturing; Nanoscience and Nanotechnology; Simulation and Modelling

Document Type: Research article

DOI: http://dx.doi.org/10.1504/IJCMSSE.2009.027489

Affiliations: 1: Process Relations GmbH, Emil-Figge-Str. 76-80, Dortmund 44227, Germany. 2: Process Relations GmbH, Emil-Figge-Str. 76-80, Dortmund 44227, Germany 3: Institute of Microsystem Technologies, University of Siegen, Holderlinstr. 3, Siegen 57068, Germany. 4: Institute of Microsystem Technologies, University of Siegen, Holderlinstr. 3, Siegen 57068, Germany

Publication date: 2009-07-28

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• The objective of the International Journal of Computational Materials Science and Surface Engineering is to establish an effective channel of communication between academic and research institutions and persons concerned with industrial research supported by practical application. It also aims at promoting and coordinating developments in the field of computational materials science and computational surface engineering by publishing original scientific papers which describe computer-aided methods of modelling, simulation and prediction for designing new engineering materials and the technological processes of the manufacturing in materials that are used for solving problems posed by materials and surface engineering professionsals, industrial managers and administrators, and technical education personnel.
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