International Journal of Computational Materials Science and Surface Engineerin

The combination of a laser beam delivered by a water jet to perform deep etching in silicon for MEMS applications
pp. 169-185(17)
Authors: Wood, David; Snowdon, Paul

Recent developments in experimental on-chip stiction research: a review
pp. 186-207(22)
Author: Spengen, W. Merlijn Van

Thin film shape memory alloys and microactuators
pp. 208-226(19)
Authors: Fu, Y.Q.; Luo, J.K.; Flewitt, A.J.; Huang, W.M.; Zhang, S.; Du, H.J.; Milne, W.I.

A review of silicon carbide development in MEMS applications
pp. 227-242(16)
Authors: Jiang, Liudi; Cheung, Rebecca

Advancement of micro/nanotechnology research in Institute of Precision Engineering of Xi'an Jiaotong University
pp. 243-267(25)
Authors: Jiang, Zhuang-De; Jing, Wei-Xuan; Zhao, Yu-Long; Wang, Hai-Rong; Lu, De-Jiang

Low stress nanoporous SiN<SUB align=right>x membrane for cell culture
pp. 268-281(14)
Authors: Wei, Jia-Shen; Leck, Kwong Joo; Gaughwin, Philip; Avram, Marioara; Iliescu, Ciprian

Design and fabrication of a microgripper with a topology optimal compliant mechanism
pp. 282-301(20)
Authors: Huang, Shyh-Chour; Chiu, Chien-Ching; Chen, Wei-Liang

Modelling and simulations of DRIE including a footing effect
pp. 302-311(10)
Authors: Zhang, Jian; Huang, Qing-An; Li, Wei-Hua

Process development support environment: a tool suite to engineer manufacturing sequences
pp. 312-334(23)
Authors: Ortloff, Dirk; Popp, Jens; Schmidt, Thilo; Bruck, Rainer

Indentation on very smooth silicon wafers
pp. 335-341(7)
Authors: Huang, W.M.; Fan, H.; Leng, S.C.

Nanomechanical characterisation of MEMS thin film materials
pp. 342-354(13)
Authors: He, J.H.; Luo, J.K.; Hopcroft, M.A.; Le, H.R.; Moore, D.F.