Low-temperature processing of sol-gel-derived lead-zirconate-titanate thin films by oxygen-plasma treatment

Authors: Kang E.K.; Jang H.K.; Lee S.K.; Park E.R.; Lee C.E.¹; Kim K.M.; Noh S.J.; Yeom S.-J.

Source: Current Applied Physics, Volume 2, Number 5, October 2002 , pp. 407-409(3)

Publisher: Elsevier

Keywords: [Physical Astronomy Classification Scheme] 77.80.-; [Physical Astronomy Classification Scheme] 81.65.-; [Physical Astronomy Classification Scheme] 52.77.-; [Physical Astronomy Classification Scheme] 81.10.J; Low-temperature processing; PZT; Thin films; Oxygen-plasma treatment

Language: English

Document Type: Research article

DOI: 10.1016/S1567-1739(02)00150-5

Affiliations: 1: Department of Physics, Korea University, 136-701, Seoul, South Korea

Links for this article

http://www.ingentaconnect.com/els/15671739/2002/00000002/00000005/art00150
http://openurl.ingenta.com/content?genre=article&issn=1567-1739&volume=2&issue=5&spage=407&epage=409
http://dx.doi.org/10.1016/S1567-1739(02)00150-5