Low-temperature processing of sol-gel-derived lead-zirconate-titanate thin films by oxygen-plasma treatment

Authors: Kang E.K.; Jang H.K.; Lee S.K.; Park E.R.; Lee C.E.; Kim K.M.; Noh S.J.; Yeom S.-J.

Source: Current Applied Physics, Volume 2, Number 5, October 2002 , pp. 407-409(3)

Publisher: Elsevier

This article is hosted on another website.

You may be required to register, activate a subscription or purchase the article before you can obtain the full text.

Keywords: [Physical Astronomy Classification Scheme] 77.80.-; [Physical Astronomy Classification Scheme] 81.65.-; [Physical Astronomy Classification Scheme] 52.77.-; [Physical Astronomy Classification Scheme] 81.10.J; Low-temperature processing; PZT; Thin films; Oxygen-plasma treatment

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S1567-1739(02)00150-5

Affiliations: 1: Department of Physics, Korea University, 136-701, Seoul, South Korea

Publication date: 2002-10-01

Free content

New content

Open access content

Subscribed content

Free trial content

Here are a few pages on the site that we think you may find useful:

Website © Publishing Technology. Article copyright remains with the publisher, society or author(s) as specified within the article.