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Defect structures in TaSi2 thin films produced by co-sputtering

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Keywords: Crystal structure; Phase transformation; Sputtering; Thin film; Transmission electron microscopy

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S1359-6454(03)00034-X

Affiliations: Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, 606-8501, Kyoto, Japan

Publication date: May 7, 2003

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