Relation between delamination of thin flims and backward deviation of load-displacement curves under repeating nanoindentation

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Keywords: Backward deviation; Delamination; Nanoindentation; Residual stresses; Thin films

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S1359-6454(02)00429-9

Affiliations: Department of Mechanical System Engineering, Faculty of Engineering, Hiroshima University, Kagamiyama 1-4-1, 739-8527, Higashi-Hiroshima, Japan

Publication date: January 22, 2003

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