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Stress and shape evolution of irregularities in oxide films on elastic-plastic substrates due to thermal cycling and film growth

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Keywords: Mechanical properties-thermally activated process; Oxidation; Theory &; Thin films; modeling-defects

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S1359-6454(01)00059-3

Affiliations: Department of Mechanical Engineering, University of Connecticut, 06269, Storrs, CT, USA

Publication date: May 25, 2001

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