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Hardness of compositionally nano-modulated TiN films

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Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0965-9773(99)00240-8

Affiliations: Kanazawa Institute of Technology, AMS R&D Center Yatsukaho, Matto, Ishikawa, e-mail:kusano@neptune.kanazawa-it.ac.jp, Japan

Publication date: January 1, 1999

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