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Publisher: Elsevier

Volume 12, Number 4, November 1998

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Deposition and etch processes: continuum film evolution in microelectronics
pp. 333-353(21)
Authors: Cale, T.S.; Rogers, B.R.; Merchant, T.P.; Borucki, L.J.

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Thin film deposition: fundamentals and modeling
pp. 354-380(27)
Authors: Gilmer, G.H.; Huang, H.; Roland, C.

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