Low temperature surface passivation for silicon solar cells

Authors: Sinke W.C.1; Leguijt C.; Lolgen P.; Eikelboom J.A.; Weeber A.W.; Schuurmans F.M.; Alkemade P.F.A.; Sarro P.M.; Maree C.H.M.; Verhoef L.A.

Source: Solar Energy Materials and Solar Cells, Volume 40, Number 4, 1 August 1996 , pp. 297-345(49)

Publisher: Elsevier

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Keywords: Silicon; Solar cells; PECVD; Silicon nitride; Silicon oxide; Surface passivation

Language: English

Document Type: Research article

DOI: 10.1016/0927-0248(95)00155-7

Affiliations: 1: Netherlands Energy Research Foundation ECN, PO Box 1, 1755 ZG Petten, Netherlands

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