Diamond tip fabrication by air-plasma etching of diamond with an oxide mask

Authors: Baik E.-S.E.-S.; Baik Y.-J.Y.-J.; Jeon D.

Source: Diamond and Related Materials, Volume 8, Number 12, December 1999 , pp. 2169-2171(3)

Publisher: Elsevier

Keywords: Conical shape; Diamond micro-tips array; Dirty etching process; Facetting of mask

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0925-9635(99)00185-5

Affiliations: 1: aKorea Institute of Science and Technology, Thin Film Technology Research Center, PO Box 131, Cheongryang, Seoul, South Korea

Publication date: 1999-12-01

• In this: publication
• By this: publisher
• In this Subject: Geology ,  Mechanical Engineering
• By this author: Baik E.-S.E.-S. ;  Baik Y.-J.Y.-J. ;  Jeon D.

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