A simple model to describe the anisotropy of diamond polishing

Authors: Serre C.; Perez-Rodrguez A.; Morante J.R.; Gorostiza P.; Esteve J.; van Bouwelen F.M.1; van Enckevort W.J.P.

Source: Diamond and Related Materials, Volume 8, Number 2, March 1999 , pp. 840-844(5)

Publisher: Elsevier

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Keywords: Mechanical properties; Micromechanical devices; Thin films; Polysilicon; Silicon carbide; Atomic force microscope; Young's modulus; Anisotropy; Diamond; PBC vectors; Polishing

Language: English

Document Type: Research article

DOI: 10.1016/S0925-9635(98)00347-1

Affiliations: 1: Research Institute for Materials, University of Nijmegen, Faculty of Science, Toernooiveld 1, 6525 ED, Nijmegen, The Netherlands

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