Skip to main content

A polysilicon flow sensor for gas flow meters

Download / Buy Article:

This article is hosted on another website.

You may be required to register, activate a subscription or purchase the article before you can obtain the full text.

Proceed

Keywords: Dynamic range; Flow sensors; Polysilicon; Power consumption; Response time

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0924-4247(97)80027-1

Affiliations: Frontier Technology Research Institute, Tokyo Gas Co. Ltd., 1-7-7 Suehiro-cho, Tsurumi-ku, Yokohama, 230, Japan

Publication date: June 1, 1996

els/09244247/1996/00000054/00000001/art80027
dcterms_title,dcterms_description,pub_keyword
6
5
20
40
5

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more