A polysilicon flow sensor for gas flow meters

Authors: Neda T.; Nakamura K.; Takumi T.

Source: Sensors and Actuators A: Physical, Volume 54, Number 1, June 1996 , pp. 626-631(6)

Publisher: Elsevier

Keywords: Polysilicon; Flow sensors; Dynamic range; Response time; Power consumption

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0924-4247(97)80027-1

Affiliations: 1: Frontier Technology Research Institute, Tokyo Gas Co. Ltd., 1-7-7 Suehiro-cho, Tsurumi-ku, Yokohama, 230, Japan

Publication date: 1996-06-01

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• In this Subject: Electrical & Nuclear Engineering
• By this author: Neda T. ;  Nakamura K. ;  Takumi T.

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