The role of hydrogen in the formation of microcrystalline silicon

Authors: Fontcuberta i Morral A.; Bertomeu J.; Roca i Cabarrocas P.

Source: Materials Science and Engineering: B, Volume 69, Number 70, 14 January 2000 , pp. 559-563(5)

Publisher: Elsevier

Keywords: Microcrystalline silicon films; Hydrogen; Low temperatures

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0921-5107(99)00324-4

Affiliations: 1: aEcole Polytechnique, LPICM UMR 7647 CNRS, 91128, Palaiseau, France

Publication date: 2000-01-14

• In this: publication
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• In this Subject: General & Civil Engineering ,  Materials & Manufacturing ,  Nuclear Physics ,  Industrial Engineering
• By this author: Fontcuberta i Morral A. ;  Bertomeu J. ;  Roca i Cabarrocas P.

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