Mechanical deformation of PZT thin films for MEMS applications

Authors: Bahr D.F.1; Robach J.S.; Wright J.S.; Francis L.F.; Gerberich W.W.

Source: Materials Science and Engineering: A, Volume 259, Number 1, 15 January 1999 , pp. 126-131(6)

Publisher: Elsevier

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Keywords: Indentation; PZT; Thin films

Language: English

Document Type: Research article

DOI: 10.1016/S0921-5093(98)00868-5

Affiliations: 1: Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164-2920, USA

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