From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH₄/H₂ gas mixture using MW-PECVD

Authors: Fu Y.¹; Sun C.Q.; Du H.; Yan B.

Source: Surface and Coatings Technology, Volume 160, Number 2, 22 October 2002 , pp. 165-172(8)

Publisher: Elsevier

Keywords: Diamond; Silicon carbon nitride; MW-PECVD; Nitrogen

Language: English

Document Type: Research article

DOI: 10.1016/S0257-8972(02)00418-8

Affiliations: 1: School of MPE, Nanyang Technological University, 639798, Singapore, Singapore

Links for this article

http://www.ingentaconnect.com/els/02578972/2002/00000160/00000002/art00418
http://openurl.ingenta.com/content?genre=article&issn=0257-8972&volume=160&issue=2&spage=165&epage=172
http://dx.doi.org/10.1016/S0257-8972(02)00418-8

From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH4/H2 gas mixture using MW-PECVD