From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH₄/H₂ gas mixture using MW-PECVD

Authors: Fu Y.; Sun C.Q.; Du H.; Yan B.

Source: Surface and Coatings Technology, Volume 160, Number 2, 22 October 2002 , pp. 165-172(8)

Publisher: Elsevier

Keywords: Diamond; Silicon carbon nitride; MW-PECVD; Nitrogen

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0257-8972(02)00418-8

Affiliations: 1: School of MPE, Nanyang Technological University, 639798, Singapore, Singapore

Publication date: 2002-10-22

• In this: publication
• By this: publisher
• In this Subject: Physical & Theoretical Chemistry ,  Materials & Manufacturing
• By this author: Fu Y. ;  Sun C.Q. ;  Du H. ;  Yan B.

Website © Publishing Technology. Article copyright remains with the publisher, society or author(s) as specified within the article.

• Terms and conditions
• Privacy policy
• Information for advertisers