From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH4/H2 gas mixture using MW-PECVD

Authors: Fu Y.1; Sun C.Q.; Du H.; Yan B.

Source: Surface and Coatings Technology, Volume 160, Number 2, 22 October 2002 , pp. 165-172(8)

Publisher: Elsevier

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Keywords: Diamond; Silicon carbon nitride; MW-PECVD; Nitrogen

Language: English

Document Type: Research article

DOI: 10.1016/S0257-8972(02)00418-8

Affiliations: 1: School of MPE, Nanyang Technological University, 639798, Singapore, Singapore

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