Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

Authors: Kim S.T.¹; Kim J.W.; Jung S.W.; Shin J.S.; Lee W.J.; Ahn S.T.

Source: Materials Chemistry and Physics, Volume 45, Number 2, August 1996 , pp. 155-158(4)

Publisher: Elsevier

Keywords: PZT thin films; Electrical properties; Ferroelectric thin films

Language: English

Document Type: Research article

DOI: 10.1016/0254-0584(96)80094-0

Affiliations: 1: Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, South Korea

Links for this article

http://www.ingentaconnect.com/els/02540584/1996/00000045/00000002/art80094
http://openurl.ingenta.com/content?genre=article&issn=0254-0584&volume=45&issue=2&spage=155&epage=158
http://dx.doi.org/10.1016/0254-0584(96)80094-0