Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

Authors: Kim S.T.; Kim J.W.; Jung S.W.; Shin J.S.; Lee W.J.; Ahn S.T.

Source: Materials Chemistry and Physics, Volume 45, Number 2, August 1996 , pp. 155-158(4)

Publisher: Elsevier

Keywords: PZT thin films; Electrical properties; Ferroelectric thin films

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/0254-0584(96)80094-0

Affiliations: 1: Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, South Korea

Publication date: 1996-08-01

• In this: publication
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• In this Subject: Chemical Engineering ,  General & Civil Engineering ,  Materials & Manufacturing ,  Industrial Engineering
• By this author: Kim S.T. ;  Kim J.W. ;  Jung S.W. ;  Shin J.S. ;  Lee W.J. ;  Ahn S.T.

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