Low grain size TiN thin films obtained by low energy ion beam assisted deposition

Authors: Lopez J.M.; Gordillo-Vazquez F.J.; Bohme O.; Albella J.M.1

Source: Applied Surface Science, Volume 173, Number 3, 29 March 2001 , pp. 290-295(6)

Publisher: Elsevier

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Keywords: Titanium nitride; Hardness; Wear improvement; IBAD

Language: English

Document Type: Research article

DOI: 10.1016/S0169-4332(00)00912-0

Affiliations: 1: aDepartamento de Fsica, Universidad Cayetano Heredia, Av. Honorio Delgado 430, 31, Lima, Peru

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