XPS investigation of Upilex-S polyimide ablated by 355 nm Nd:YAG laser irradiation

Authors: Yung K.C.1; Zeng D.W.; Yue T.M.

Source: Applied Surface Science, Volume 173, Number 3, 29 March 2001 , pp. 193-202(10)

Publisher: Elsevier

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Keywords: Pulse Nd:YAG laser ablation; Upilex-S polyimide; X-ray photoelectron spectroscopy (XPS)

Language: English

Document Type: Research article

DOI: 10.1016/S0169-4332(00)00884-9

Affiliations: 1: Department of Manufacturing Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, , Hong Kong, China

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