@article {Bruines:December 2000:0167-9317:35,
	author = "Bruines J.J.P.",
	title = "Process Outlook for Analog and RF Applications",
	journal = "Microelectronic Engineering",
	volume = "54",
	year = "December 2000",
	abstract = "",
	pages = "35-48(14)",
	url = "http://www.ingentaconnect.com/content/els/01679317/2000/00000054/00000001/art00480"
	doi = "doi:10.1016/S0167-9317(00)00480-9"
}