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A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology

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Keywords: Compressible and incompressible fluid-mechanical p; Dual-mixed-hybrid finite element methods; Semiconductor technology; Thermal oxidation process

Document Type: Research Article

Affiliations: MOX--Modeling and Scientific Computing, Dipartimento di Matematica ''F. Brioschi'', Politecnico di Milano, Via Bonardi 9, 20133 , Milano, Italy

Publication date: January 31, 2003

els/00457825/2003/00000192/00000005/art00574
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