Authors: Kim, B.; Kim, S.; Kim, K.
Source: Vacuum, Volume 71, Number 4, 25 July 2003, pp. 497-503(7)
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Document Type: Research Article
Department of Electronic Engineering, Sejong University, 98 Kunja-Dong, Kwangjin-Ki, 143-747, Seoul, South Korea
Publication date: July 25, 2003